RC

R Cheung

11 records found

Dry etching of SiC in inductively coupled Cl-2/Ar plasma

The etching of silicon carbide in inductively coupled SF6/O-2 plasma

Etch mechanism and etch-induced effects in the inductively coupled plasma etching of GaN

X-ray photoelectron spectroscopy studies of the effects of plasma etching on amorphous carbon nitride films

A study of reactive ion etching damage effects in GaN

A study of reactive ion etching damage effects in GaN.

Inductively coupled plasma etching of GaN and its effect ton electrical characteristics.

Improvement of contact resistances on plasma-exposed silicon carbide.

Effects of dry processing on the optical properties of GaN.

High resolution reactive ion etching of GaN and etch-induced effects.

Dry etching and induced damage