Etch mechanism and etch-induced effects in the inductively coupled plasma etching of GaN

Journal article (2003)

Authors

R Cheung External organisation
B Rong Old - EWI Ch. Integrated Sensing Devices
E.W.J.M. van der Drift QN/Kavli Nanolab Delft - AS
W.G. Sloof OLD Virtual Materials and Mechanics
Research Group
Old - EWI Ch. Integrated Sensing Devices
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Published Date

2003

Language

Undefined/Unknown

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Research Group

Old - EWI Ch. Integrated Sensing Devices