Library
search
Press enter to search in title/abstract
in title/abstract
in authors
local_library
Repository
NP
NOV Plank
Academic Work (2)
Journal article (2)
Sort by descending (newest to oldest)
Sort by ascending (oldest to newest)
2 records found
1
Dry etching of SiC in inductively coupled Cl-2/Ar plasma
Journal article (2004) -
LD Jiang (author)
,
NOV Plank (author)
,
MA Blauw (author)
,
R Cheung (author)
,
E.W.J.M. van der Drift (author)
The etching of silicon carbide in inductively coupled SF6/O-2 plasma
Journal article (2003) -
NOV Plank (author)
,
MA Blauw (author)
,
E.W.J.M. van der Drift (author)
,
R Cheung (author)
