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LJ
LD Jiang
Academic Work (2)
Journal article (2)
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2 records found
1
A novel method for nanoprecision alignment in wafer bonding applications
Journal article (2007) -
LD Jiang (author)
,
G. Pandraud (author)
,
PJ French (author)
,
Pim J. French (author)
,
P.J. French (author)
,
S.M. Spearing (author)
,
M kraft (author)
Dry etching of SiC in inductively coupled Cl-2/Ar plasma
Journal article (2004) -
LD Jiang (author)
,
NOV Plank (author)
,
MA Blauw (author)
,
R Cheung (author)
,
E.W.J.M. van der Drift (author)