M kraft | TU Delft Repository

Mk

M kraft

Conference paper (2)

Journal article (1)

3 records found

1

A novel method for nanoprecision alignment in wafer bonding applications

Journal article (2007) - LD Jiang (author), G. Pandraud (author), PJ French (author), Pim J. French (author), P.J. French (author), S.M. Spearing (author), M kraft (author)

Wafer bonding with nanoprecision alignment for micro/nano systems

Conference paper (2007) - L Jiang (author), G. Pandraud (author), P.J. French (author), PJ French (author), Pim J. French (author), SM Spearing (author), M kraft (author)

Nanoprecision alignment for wafer bonding (U-SP-2-I-ICT)

Conference paper (2006) - G. Pandraud (author), PJ French (author), P.J. French (author), Pim J. French (author), Jiang Liudi (author), S.M. Spearing (author), M kraft (author)