A novel method for nanoprecision alignment in wafer bonding applications

Journal article (2007)

Authors

LD Jiang External organisation

G. Pandraud QN/High Resolution Electron Microscopy

PJ French Electronic Instrumentation -

Pim J. French Electronic Instrumentation -

P.J. French Electronic Instrumentation -

S.M. Spearing External organisation

M kraft External organisation

Research Group

QN/High Resolution Electron Microscopy

Elektrotechniek Techniek

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Published Date

2007

Language

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Research Group

QN/High Resolution Electron Microscopy