Y Zhang | TU Delft Repository

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Y Zhang

Conference paper (1)

Doctoral thesis (1)

Journal article (5)

7 records found

1

Electron optics of microlenses with inclined beams

Journal article (2008) - Y Zhang (author), JE Barth (author), P. Kruit (author)

Design of a high brightness multi-electron beam source

Conference paper (2008) - Y Zhang (author), P. Kruit (author)

A 100-electron-beam source from a high brightness Schottky emitter for fast patterning applications

Doctoral thesis (2008) - Y Zhang (author)

High brightness 100-electron-beam-source for high resolution applications

Journal article (2007) - Y Zhang (author), P. Kruit (author)

Thermal Model of Miniaturized Schottky Emitter for Parallel Electron Beam Lithography

Journal article (2007) - AK Dokania (author), JFM Velthuis (author), Y Zhang (author), P. Kruit (author)

Multibeam Electron Source using MEMS Electron Optical Components

Journal article (2006) - B van Someren (author), MJ van Bruggen (author), Y Zhang (author), C.W. Hagen (author), C. W. Hagen (author), P. Kruit (author)

Integrated Multi-electron-beam blanker array for sub-10-nm electron beam induced deposition

Journal article (2006) - Y Zhang (author), C.T.H. Heerkens (author), MJ van Bruggen (author), P. Kruit (author)