Integrated Multi-electron-beam blanker array for sub-10-nm electron beam induced deposition

Journal article (2006)

Authors

Y Zhang ImPhys/Charged Particle Optics
C.T.H. Heerkens ImPhys/Charged Particle Optics
MJ van Bruggen ImPhys/Charged Particle Optics
P. Kruit ImPhys/Charged Particle Optics
Research Group
ImPhys/Charged Particle Optics
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Published Date

2006

Language

Undefined/Unknown

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Research Group

ImPhys/Charged Particle Optics