This book describes the design and implementation of energy-efficient smart (digital output) temperature sensors in CMOS technology. To accomplish this, a new readout topology, namely the zoom-ADC, is presented. It combines a coarse SAR-ADC with a fine Sigma-Delta (SD) ADC. The digital result obtained from the coarse ADC is used to set the reference levels of the SD-ADC, thereby zooming its full-scale range into a small region around the input signal. This technique considerably reduces the SD-ADC’s full-scale range, and notably relaxes the number of clock cycles needed for a given resolution, as well as the DC-gain and swing of the loop-filter. Both conversion time and power-efficiency can be improved, which results in a substantial improvement in energy-efficiency. Two BJT-based sensor prototypes based on 1st-order and 2nd-order zoom-ADCs are presented. They both achieve inaccuracies of less than ±0.2°C over the military temperature range (-55°C to 125°C). A prototype capable of sensing temperatures up to 200°C is also presented. As an alternative to BJTs, sensors based on dynamic threshold MOSTs (DTMOSTs) are also presented. It is shown that DTMOSTs are capable of achieving low inaccuracy (±0.4°C over the military temperature range) as well as sub-1V operation, making them well suited for use in modern CMOS processes.@en

A 20-bit incremental ADC for battery-powered sensor applications is presented. It is based on an energy-efficient zoom ADC architecture, which employs a coarse 6-bit SAR conversion followed by a fine 15-bit ΔΣ conversion. To further improve its energy efficiency, the ADC employs integrators based on cascoded dynamic inverters for extra gain and PVT tolerance. Dynamic error correction techniques such as auto-zeroing, chopping and dynamic element matching are used to achieve both low offset and high linearity. Measurements show that the ADC achieves 20-bit resolution, 6 ppm INL and 1 μV offset in a conversion time
of 40 ms, while drawing only 3.5 μA current from a 1.8 V supply. This corresponds to a state-of-the-art figure-of-merit (FoM) of 182.7 dB. The 0.35 mm² chip was fabricated in a standard 0.16 μm CMOS process.@en

This paper describes an energy-efficient CMOS temperature sensor intended for use in RFID tags. The sensor achieves an inaccuracy of ±0.15°C (3σ) over the military temperature range (-55 to 125°C) and dissipates only 27nJ/conversion: over 20× less than a previous sensor with comparable accuracy and resolution [2]. This energy efficiency is achieved by the use of an improved charge-balancing scheme and a zoom ADC that combines a 5b coarse SAR conversion with a 10b fine 2 nd -order ΔΣ conversion.@en