Parallel-plate capacitors (PPC) significantly reduce the size of superconducting microwave resonators, reducing the pixel pitch for arrays of single-photon energy-resolving kinetic inductance detectors (KIDs). The frequency noise of KIDs is typically limited by tunneling two-level systems (TLS), which originate from lattice defects in the dielectric materials required for PPCs. How the frequency noise level depends on the PPC's dimensions has not been experimentally addressed. We measure the frequency noise of 56 resonators with a-SiC:H PPCs, which cover a factor of 44 in PPC area and a factor of 4 in dielectric thickness. To support the noise analysis, we measure the resonators' TLS-induced power-dependent intrinsic loss and temperature-dependent resonance frequency shift. From the TLS models, we expect a geometry-independent microwave loss and resonance frequency shift, which is set by the TLS properties of the dielectric. However, we observe a thickness-dependent microwave loss and resonance frequency shift; this is explained by surface layers that limit the performance of PPC-based resonators. For a uniform dielectric, the frequency noise level should scale directly inversely with the PPC area and thickness. We observe that an increase in PPC size reduces the frequency noise, but the exact scaling is, in some cases, weaker than expected. Finally, we derive engineering guidelines for the design of KIDs based on PPC-based resonators.

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Aims. Future actively cooled space-borne observatories for the far-infrared, loosely defined as a 1-10 THz band, can potentially reach a sensitivity limited only by background radiation from the Universe. This will result in an increase in observing speed of many orders of magnitude. A spectroscopic instrument on such an observatory requires large arrays of detectors with a sensitivity expressed as a noise equivalent power NEP = 3 × 10-20 W√ p Hz. Methods. We present the design, fabrication, and characterisation of microwave kinetic inductance detectors (MKIDs) for this frequency range reaching the required sensitivity. The devices are based on thin-film NbTiN resonators which use lens-antenna coupling to a submicron-width aluminium transmission line at the shorted end of the resonator where the radiation is absorbed. We optimised the MKID geometry for a low NEP by using a small aluminium volume of ≈1 μm3 and fabricating the aluminium section on a very thin (100 nm) SiN membrane. Both methods of optimisation also reduce the effect of excess noise by increasing the responsivity of the device, which is further increased by reducing the parasitic geometrical inductance of the resonator. Results. We measure the sensitivity of eight MKIDs with respect to the power absorbed in the detector using a thermal calibration source filtered in a narrow band around 1.5 THz. We obtain a NEPexp(Pabs) = 3:1 ± 0:9 × 10-20 W√ p Hz at a modulation frequency of 200 Hz averaged over all measured MKIDs. The NEP is limited by quasiparticle trapping. Conclusions. The measured sensitivity is sufficient for spectroscopic observations from future, actively cooled space-based observatories. Moreover, the presented device design and assembly can be adapted for frequencies up to ≈10 THz and can be readily implemented in kilopixel arrays.

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We present a "mix-and-match"process to create large structures with submicrometer features by combining UV contact lithography and 100 kV electron-beam lithography in a single layer of negative-tone resist: Micro-Resist-Technology ma-N1405. The resist is successfully applied for the fabrication of an on-chip terahertz spectrometer, where the design requires 450 nm wide lines and 300 nm wide trenches in a 150 nm thick niobium-titanium-nitride layer, tolerating errors of ± 30 nm. We use a resist thickness of 500 nm, optimized to allow reliable SF 6/O 2-based reactive ion etching of structures with 30 nm accuracy. We find that resist requires an electron-beam cross-linking dose of 1100 μ C / c m 2 for an acceleration voltage of 100 kV in combination with a 180 s 100 °C bake on a hot plate and 45 s development. The smallest resist bars made with our dedicated recipe are 100 nm wide, with the smallest gaps about 300 nm. The difference between the designed and realized feature size is between 2 and 30 nm for structures up to 700 nm wide. The optical exposure dose is 300 m J / c m 2 for the same development time and is optimized to produce a positive sloped edge profile allowing good step coverage for subsequent layers. The resist can be applied, shipped, and processed in a time span of a couple of days without notable deterioration of patterning quality.

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Advances in far infrared astronomy have been, and will be, defined by instrument capabilities. Especially relevant is the development of imaging spectrometers for the wavelength range of 0.03-3 mm, which are not available at all at this moment. We will discuss recent advances in this field: First, we discuss the development of miniature on-chip spectrometers, that can operate in a 0.09-1 THz by using lossless superconducting circuits to create miniature spectrometers. For higher frequencies this is not possible due to material limitations, moreover instruments have to be operated in space due to the opacity of the atmosphere. Recent proposals for new missions focus on space-based observatories with optics cooled down to 4K, which offer unprecedented spectral imaging speeds, but require large arrays of extremely sensitive detectors. In the second part of this paper we will discuss the development of microwave Kinetic Inductance detectors with a sensitivity of NEP. 3.1.10-20 W/ãHz, sufficient for these applications.@en

Low-loss deposited dielectrics will benefit superconducting devices such as integrated superconducting spectrometers, superconducting qubits, and kinetic inductance parametric amplifiers. Compared with planar structures, multilayer structures such as microstrips are more compact and eliminate radiation loss at high frequencies. Multilayer structures are most easily fabricated with deposited dielectrics, which typically exhibit higher dielectric loss than crystalline dielectrics. We measure the subkelvin and low-power microwave and millimeter-submillimeter-wave dielectric loss of hydrogenated amorphous silicon carbide (a-SiC:H), using superconducting chips with Nb-Ti-N/a-SiC:H/Nb-Ti-N microstrip resonators. We deposit the a-SiC:H by plasma-enhanced chemical vapor deposition at a substrate temperature of 400°C. The a-SiC:H has a millimeter-submillimeter loss tangent ranging from 0.9×10-4 at 270 GHz to 1.5×10-4 at 385 GHz. The microwave loss tangent is 3.1×10-5. These are the lowest low-power subkelvin loss tangents that have been reported for microstrip resonators at millimeter-submillimeter and microwave frequencies. The a-SiC:H films are free of blisters and have low stress: -20 MPa compressive at 200-nm thickness to 60 MPa tensile at 1000-nm thickness.

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We present a lab-on-chip experiment to accurately measure losses of superconducting microstrip lines at microwave and submillimeter wavelengths. The microstrips are fabricated from Nb-Ti-N, which is deposited using reactive magnetron sputtering, and amorphous silicon which is deposited using plasma-enhanced chemical vapor deposition (PECVD). Submillimeter wave losses are measured using on-chip Fabry-Perot resonators (FPRs) operating around 350 GHz. Microwave losses are measured using shunted half-wave resonators with an identical geometry and fabricated on the same chip. We measure a loss tangent of the amorphous silicon at single-photon energies of tan⁡δ=3.7±0.5×10-5 at approximately 6GHz and tan⁡δ=2.1±0.1×10-4 at 350 GHz. These results represent very low losses for deposited dielectrics, but the submillimeter wave losses are significantly higher than the microwave losses, which cannot be understood using the standard two-level system loss model.

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DESHIMA 2.0 is a spectrometer for astronomical applications targeting sources at sub-mm wavelengths from 240GHz to 720GHz. The design for its wide band Quasi-Optical system was presented in the previous works. In this work, the experimental validation of the beam pattern of the system at the lower end of its frequency band is presented. The measurement for the complete frequency band of the system is ongoing and will be presented at the conference.

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A superconducting on-chip microstrip filter bank spectrometer prototype for Far-Infrared (FIR) Astronomy is presented. The measurements showcase its capabilities towards moderate spectral resolution (f/\Delta f\sim 500) broadband FIR spectroscopy. In this sub-mm-wave filter bank, each spectral channel consists of an 'I-shaped' microstrip THz bandpass filter that couples the radiation to a Microwave Kinetic Inductance Detector (MKID) for a background limited detection and a scalable frequency-multiplexed microwave readout.

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Superconducting resonators and transmission lines are fundamental building blocks of integrated circuits for millimeter-submillimeter astronomy. Accurate simulation of radiation loss from the circuit is crucial for the design of these circuits because radiation loss increases with frequency, and can thereby deteriorate the system performance. Here we show a stratification for a 2.5-dimensional method-of-moment simulator Sonnet EM that enables accurate simulations of the radiative resonant behavior of submillimeter-wave coplanar resonators and straight coplanar waveguides (CPWs). The Sonnet simulation agrees well with the measurement of the transmission through a coplanar resonant filter at 374.6 GHz. Our Sonnet stratification utilizes artificial lossy layers below the lossless substrate to absorb the radiation, and we use co-calibrated internal ports for de-embedding. With this type of stratification, Sonnet can be used to model superconducting millimeter-submillimeter wave circuits even when radiation loss is a potential concern.@en

DESHIMA 2.0 is a broadband sub-mm wave superconducting on-chip spectrometer for astronomy, targeting an instantaneous octave bandwidth (220 - 440 GHz) sampled with moderate spectral resolution channels (f/df ~ 500). In this work we propose a microstrip filter-bank implementation for DESHIMA 2.0 based on “H-shaped” resonators. These bandpass filters are free from spurious resonances over an octave bandwidth, do not suffer from radiation losses and can be arrayed in large filter-banks thanks to their extremely low reflections off-resonance. The design has been aided by an analytical circuit model that can fast and reliably predict the filter-bank behaviour. Prototype chips have been characterised in terms of frequency response and coupling efficiency.@en

DESHIMA 2.0 is a sub-millimetre wave spectrometer based on a single superconducting chip with a large instantaneous bandwidth. The instrument consists of a Quasi-optical (QO) system and an on-chip filter-bank coupled to an array of Kinetic Inductance Detectors (KID). In this work, this broad band QO system, operating at sub-millimetre wavelengths (220 GHz to 720 GHz), will be presented. This design is achieved using a field matching technique and consists of a hyper-hemispherical leaky lens antenna coupled to a series of Dragonian reflectors. The optimized design has an average illumination efficiency over the band of ~70%. This performance is also measured directly through the response of the KIDs.@en

Microfabrication of on-chip filterbanks, such as DESHIMA 2.0, would greatly benefit from reliable fabrication with sub-micrometer resolution. This enables smaller devices and reduces scatter in parameters such as filter bandwidth and resonant frequency. Here we present “mix-and-match” processing by combining optical and electron-beam exposures of a single layer of negative ma-N1405 resist from Micro-Resist-Technology GmbH. This allows for minimal features down to 300 nm where needed and large structure exposure with UV, limiting e-beam writing time. Relative alignment is possible to less than 500 nm on a regular basis.@en

Far infra-red, mm and sub-mm astronomy requires very large arrays of detectors for future wide field cameras and spectrometers. We present an array of lens-antenna coupled Microwave Kinetic Inductance Detectors (MKID) for a wide field camera at 350 GHz. We discuss the optimization to maximize the usable detector yield and matching the array to the readout to enable array performance close to the background limit. We overview the optical characterization techniques required to have confidence in the instrument performance prior to on telescope integration, finally giving measured optical performance for an optimized array.@en

For space observatories, the glitches caused by high energy phonons created by the interaction of cosmic ray particles with a detector substrate lead to dead time during observation. Mitigating the impact of cosmic rays is therefore an important requirement for detectors to be used in future space missions. In order to investigate possible solutions, we carry out a systematic study by testing four large arrays of Microwave Kinetic Inductance Detectors (MKIDs), each consisting of ∼960 pixels and fabricated on monolithic 55 mm × 55 mm × 0.35 mm Si substrates. We compare the response to cosmic ray interactions in our laboratory for different detector arrays: A standard array with only the MKID array as reference, an array with a low T_c superconducting film as a phonon absorber on the opposite side of the substrate, and arrays with MKIDs on membranes. The idea is that the low T_c layer down converts the phonon energy to values below the pair breaking threshold of the MKIDs, and the membranes isolate the sensitive part of the MKIDs from phonons created in the substrate. We find that the dead time can be reduced up to a factor of 40 when compared to the reference array. Simulations show that the dead time can be reduced to below 1% for the tested detector arrays when operated in a spacecraft in an L2 or a similar far-Earth orbit. The technique described here is also applicable and important for large superconducting qubit arrays for future quantum computers.

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We present the development of a background-limited kilo-pixel imaging array of ultrawide bandwidth kinetic inductance detectors (KIDs) suitable for space-based THz astronomy applications. The array consists of 989 KIDs, in which the radiation is coupled to each KID via a leaky lens antenna, covering the frequency range between 1.4 and 2.8 THz. The single pixel performance is fully characterised using a representative small array in terms of sensitivity, optical efficiency, beam pattern and frequency response, matching very well its expected performance. The kilo-pixel array is characterised electrically, finding a yield larger than 90% and an averaged noise-equivalent power lower than 3 × 10^{- 19} W/Hz^{1 / 2}. The interaction between the kilo-pixel array and cosmic rays is studied, with an expected dead time lower than 0.6% when operated in an L2 or a similar far-Earth orbit.

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Astronomical observations at infrared, sub-millimetre, and millimetre wavelengths are essential for addressing many of the key questions in astrophysics. Future ground- and space based observatories need large detector arrays with a sensitivity limited only by the noise of the radiation background. We demonstrate that antenna coupled Microwave Kinetic Inductance Detectors allow us to create kpixel large arrays with background limited sensitivity over the entire FIR/mmwavelength range. We discuss in detail the readout system and experimental results of a 961 pixel array, optimised for 850 GHz radiation that is read out with a single readout chain.@en

Next generation sub-mm imaging instruments require kilo-pixel focal plane arrays filled with background limited detectors. Microwave kinetic inductance detectors (MKIDs) are a state-of-the-art detector for future instruments due to their inherent multiplexing capabilities. An MKID consists of a superconducting resonator coupled to a feed-line that is used for readout. In the device presented here radiation coupling is achieved by coupling the MKID directly to a planar antenna. The antenna is placed in the focus of an extended hemispherical lens to increase the filling factor and to match efficiently to fore optics. In this paper, we present the design and the optical performance of MKIDs optimized for operation in a 100-GHz band around 850 GHz. We have measured the coupling efficiency, frequency response, and beam patterns and compare those results to simulated performance. We obtain an excellent agreement between the measured and simulated beam pattern, frequency response, and absolute coupling efficiency between a thermal calibration source and the power absorbed in the detector. Additionally, we demonstrate that antenna coupled MKIDs offer background limited radiation detection down to ∼100 aW of power absorbed in the detector.

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We present results from the first vector beam pattern measurement of microwave kinetic inductance detectors (MKIDs). Vector beam patterns require sampling of the E-field of the receiver in both amplitude and phase. MKIDs are inherently direct detectors and have no phase response to incoming radiation. We map the amplitude and phase patterns of the detector beam profile by adapting a two-source heterodyne technique. Our testing strategy recovers the phase information by creating a reference signal to trigger data acquisition. The reference is generated by mixing the slightly offset low-frequency signals from the output of the two synthesizers used to drive the submillimeter sources. The key requirement is that the time-series record always begins at the same set phase of the reference signal. As the source probe is scanned within the receiver beam, the wavefront propagation phase of the receiver changes and causes a phase offset between the detector output and reference signals. We demonstrated this technique on the central pixel of a test array operating at 350 GHz. This methodology will enable vector beam pattern measurements to be performed on direct detectors, which have distinct advantages reducing systematic sources of error, allowing beam propagation, and removing the far-field measurement requirement such that complicated optical systems can be measured at a point that is easily accessible, including the near field.@en

Large ultrasensitive detector arrays are needed for present and future observatories for far infrared, submillimeter wave (THz), and millimeter wave astronomy. With increasing array size, it is increasingly important to control stray radiation inside the detector chips themselves, the surface wave. We demonstrate this effect with focal plane arrays of 880 lens-antenna coupled microwave kinetic inductance detectors (MKIDs). Presented here are near field measurements of the MKID optical response versus the position on the array of a reimaged optical source. We demonstrate that the optical response of a detector in these arrays saturates off-pixel at the ∼-30-dB level compared to the peak pixel response. The result is that the power detected from a point source at the pixel position is at a similar level to the stray response integrated over the chip area. With such a contribution, it would be impossible to measure extended sources, while the point source sensitivity is degraded due to an increase of the stray loading. However, we show that by incorporating an on-chip stray light absorber, the surface wave contribution is reduced by a factor >10. With the on-chip stray light absorber, the point source response is close to simulations down to the ∼ -35-dB level, the simulation based on an ideal Gaussian illumination of the optics. In addition, as a crosscheck, we show that the extended source response of a single pixel in the array with the absorbing grid is in agreement with the integral of the point source measurements.

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