RJM Mallee | TU Delft Repository

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RJM Mallee

Conference paper (4)

4 records found

1

Potential use of laser annealing in semiconductor processing [op CD-Rom verschenen]

Conference paper (1999) - L.K. Nanver (author), Q Ren (author), LCM van Oever (author), RJM Mallee (author), JHCM Slabbekoorn (author), GJ Bertens (author), E.J.G. Goudena (author), MR van den Berg (author), H. Schellevis (author), H.W. van Zeijl (author), T.L.M. Scholtes (author)

Application of excimer laser annealing in the formation of implanted shallow junctions

Conference paper (1999) - L.K. Nanver (author), E.J.G. Goudena (author), Q Ren (author), MR van den Berg (author), RJM Mallee (author), JHCM Slabbekoorn (author)

Ultra-low-temperature low-ohmic contacts for SOA applications

Conference paper (1999) - L.K. Nanver (author), H.W. van Zeijl (author), H. Schellevis (author), RJM Mallee (author), JHCM Slabbekoorn (author), R. Dekker (author), JW Slotboom (author)

Doping of polysilicon emitters by excimer laser-annealing [niet eerder gehonoreerd]

Conference paper (1998) - MR van den Berg (author), L.K. Nanver (author), Q Ren (author), C.C.G. Visser (author), RJM Mallee (author), JW Slotboom (author)