Application of excimer laser annealing in the formation of implanted shallow junctions

Conference paper (1999)

Authors

L.K. Nanver Electronic Components, Technology and Materials -

E.J.G. Goudena Electronic Components, Technology and Materials -

Q Ren Old - EWI Sect. ECTM

MR van den Berg Electronic Components, Technology and Materials -

RJM Mallee Electronic Components, Technology and Materials -

JHCM Slabbekoorn Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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Published Date

1999

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials