C. Juffermans | TU Delft Repository

CJ

C. Juffermans

Conference paper (1)

Journal article (2)

3 records found

1

Experimental determination of lens abberations from the intensity pointspread function in the focal region

Journal article (2003) - P. Dirksen (author), J.J.M. Braat (author), C. Juffermans (author), A Leeuwestein (author)

Aberration retrieval using the extended Nijboer-Zernike approach

Journal article (2003) - P. Dirksen (author), J.J.M. Braat (author), AJEM Janssen (author), C. Juffermans (author)

Observations on the Optical Point Spread Function of a Lithographic Projection Lens

Conference paper (2002) - P. Dirksen (author), J.J.M. Braat (author), P. de Bisschop (author), A Janssen (author), C. Juffermans (author), A. Williams (author)