AJEM Janssen | TU Delft Repository

AJ

AJEM Janssen

Book chapter (2)

Conference paper (3)

Journal article (19)

Poster (4)

28 records found

1

Vectorial Aerial-image computations of three-dimensional objects based on the Extended Nijboer-Zernike Theory

Journal article (2009) - S. van Haver (author), J.J.M. Braat (author), AJEM Janssen (author), O.T.A. Janssen (author), S.F. Pereira (author)

Vectorial aerial-image computations of three-dimensional objects based on the extended Nijboer-Zernike theory

Journal article (2009) - S. van Haver (author), J.J.M. Braat (author), AJEM Janssen (author), O.T.A. Janssen (author), S.F. Pereira (author)

Characterization of a novel mask imaging algorithm based on the Extended Nijboer-Zernike (ENZ) formalism.

Poster (2008) - S. van Haver (author), O.T.A. Janssen (author), AJEM Janssen (author), J.J.M. Braat (author), S.F. Pereira (author), P Evanschitzky (author)

Evaluation of scaled and annular pupils within the framework od the extended Nijboer-Zernike (ENZ) formalism.

Poster (2008) - S. van Haver (author), J.J.M. Braat (author), S.F. Pereira (author), AJEM Janssen (author)

Zernike representation and Strehl ratio op optical systems with variable numerical aperture.

Journal article (2008) - AJEM Janssen (author), S. van Haver (author), P. Dirksen (author), J.J.M. Braat (author)

General imaging of advanced 3D mask object based on the fully-vectorial extended Nijboer-Zernike (ENZ) theory.

Journal article (2008) - S. van Haver (author), O.T.A. Janssen (author), J.J.M. Braat (author), AJEM Janssen (author), Paul Urbach (author), H. P. Urbach (author), S.F. Pereira (author)

Analytic expressions and approximations for the on-axis, aberration-free Rayleigh and Debye intergral in the case of focusing fields on a circular aperture.

Journal article (2008) - RM Aarts (author), J.J.M. Braat (author), P. Dirksen (author), S. van Haver (author), F van Heesch (author), AJEM Janssen (author)

Image simulations of extended objects using an algorithm based on the Extended Nijboer Zernike (ENZ) formalism

Poster (2008) - S. van Haver (author), O.T.A. Janssen (author), AJEM Janssen (author), J.J.M. Braat (author), S.F. Pereira (author)

Assessment of optical systems by means of point-spread functions.

Book chapter (2008) - J.J.M. Braat (author), S. van Haver (author), AJEM Janssen (author), P. Dirksen (author)

Extended Nijboer-Zernike (ENZ) based mask imaging: efficient coupling of electromagnetic field solvers and the ENZ imaging algorithm

Journal article (2008) - O.T.A. Janssen (author), S. van Haver (author), AJEM Janssen (author), J.J.M. Braat (author), Paul Urbach (author), H. P. Urbach (author), S.F. Pereira (author)

Extended Nijboer-Zernike (ENZ) based evaluation of amplitude and phase aberrations on scaled and annual pupils.

Conference paper (2007) - S. van Haver (author), AJEM Janssen (author), P. Dirksen (author), J.J.M. Braat (author)

Strehl ratio and optimum focus of high-numerical-aperture beams.

Journal article (2007) - AJEM Janssen (author), S. van Haver (author), J.J.M. Braat (author), P. Dirksen (author)

High-NA aberration retrieval with extended Nijboer-Zernike vector diffraction theory: Erratum

Journal article (2007) - S. van Haver (author), J.J.M. Braat (author), P. Dirksen (author), AJEM Janssen (author)

Estimating resist parameters in optical lithograpgy using the extended Nijboer-Zernike theory

Journal article (2006) - P. Dirksen (author), J.J.M. Braat (author), AJEM Janssen (author)

High-NA aberration retrieval with the extended Nijboer-Zernike vector diffraction theory.

Journal article (2006) - S. van Haver (author), J.J.M. Braat (author), P. Dirksen (author), AJEM Janssen (author)

Aerial image based lens metrology for wafer steppers.

Journal article (2006) - P. Dirksen (author), J.J.M. Braat (author), AJEM Janssen (author), A Leeuwestein (author), T Matsuyama (author), T Noda (author)

High-NA lens characterization by through-focus intensity measurement

Conference paper (2006) - S. van Haver (author), J.J.M. Braat (author), P. Dirksen (author), AJEM Janssen (author)

Aberration retrieval for high-NA optical systems using the extended Nijboer-Zernike theory

Journal article (2005) - P. Dirksen (author), J.J.M. Braat (author), AJEM Janssen (author), A Leeuwenstein (author)

Abberation retrieval from the intensity points-spread function in the focal region using the extended

Journal article (2005) - C van der Avoort (author), J.J.M. Braat (author), P. Dirksen (author), AJEM Janssen (author)

Extended Nijboer-Zernike approach to aberration and birefringence retrieval in a high-numerical-aperture optical system

Journal article (2005) - J.J.M. Braat (author), P. Dirksen (author), AJEM Janssen (author), A.S. van de Nes (author), S. van Haver (author)