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HV
H Vonach
Academic Work (1)
Journal article (1)
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Stochastic coulomb interactions in ion projection lithography systems with aberration-broadened crossover
Journal article (1997) -
P. Kruit (author)
,
JE Barth (author)
,
G Lammer (author)
,
A Chalupka (author)
,
H Vonach (author)
,
H Löschner (author)
,
G Stengl (author)
