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M Foisy
Academic Work (1)
Journal article (1)
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Approach to the characterization of through-oxide boron implantation by secondary ion mass spectrometry.
Journal article (2000) -
ZX Jiang (author)
,
S Backer (author)
,
JJ Lee (author)
,
LY Wu (author)
,
T Guenther (author)
,
D Sieloff (author)
,
P Choi (author)
,
M Foisy (author)
,
P.F.A. Alkemade (author)