MF Bal | TU Delft Repository

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MF Bal

Conference paper (4)

Doctoral thesis (1)

Journal article (3)

8 records found

1

Optimization of mulitlayer reflectors for extreme ultraviolet lithography

Journal article (2004) - MF Bal (author), M Singh (author), J.J.M. Braat (author)

Next-Generation Extreme Ultraviolet Lithographic Projection Systems

Doctoral thesis (2003) - MF Bal (author)

Analysis search and classification for reflective ring-field projection systems

Journal article (2003) - MF Bal (author), F. Bociort (author), J.J.M. Braat (author)

Wavefront correction methods for extreme-ultraviolet multilayer reflectors

Journal article (2003) - M Singh (author), MF Bal (author), J.J.M. Braat (author), D Joyeux (author), U Dinger (author)

Optimizing multilayer coatings for extreme UV projection systems

Conference paper (2002) - MF Bal (author), M Singh (author), J.J.M. Braat (author)

Influence of Multilayers on the optical Performance of Extreme Ultra Violet Projection Systems.

Conference paper (2002) - MF Bal (author), F. Bociort (author), J.J.M. Braat (author)

The effect of obstructions on the design of reflective ring-field projection systems.

Conference paper (2001) - MF Bal (author), F. Bociort (author), J.J.M. Braat (author)

Systematic analysis of unobscured mirror systems for microlithography.

Conference paper (2000) - F. Bociort (author), MF Bal (author), J.J.M. Braat (author)