Systematic analysis of unobscured mirror systems for microlithography.

Conference paper (2000)

Authors

F. Bociort ImPhys/Optics - AS
MF Bal ImPhys/Optics - AS
J.J.M. Braat ImPhys/Optics - AS
Research Group
ImPhys/Optics (AS) (TU Delft)
More Info
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Published Date

2000

Language

Undefined/Unknown

Reuse Rights

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Faculty

Applied Sciences

Department

ImPhys/Imaging Physics

Research Group

ImPhys/Optics