Design of an aberration corrected low-voltage SEM

Journal article (2010)

Authors

RH van Aken ImPhys/Charged Particle Optics
D.J. Maas External organisation
C. W. Hagen ImPhys/Charged Particle Optics
C.W. Hagen ImPhys/Charged Particle Optics
JE Barth ImPhys/Charged Particle Optics
P. Kruit ImPhys/Charged Particle Optics
Research Group
ImPhys/Charged Particle Optics
More Info
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Published Date

2010

Language

English

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Research Group

ImPhys/Charged Particle Optics