Depth-selective 2D-ACAR studies on low-k dielectric thin film S Radiation physics and chemistry

Journal article (2003)

Authors

S.W.H. Eijt Old - Section Defects in Materials
A van Veen Old - Section Defects in Materials
CV Falub Old - Section Defects in Materials
R Escobar Galindo Old - Section Defects in Materials
H. Schut Old - Section Defects in Materials
P.E. Mijnarends Old - Section Defects in Materials
Research Group
Old - Section Defects in Materials
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Published Date

2003

Language

Undefined/Unknown

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Research Group

Old - Section Defects in Materials