Sensitive capacitive pressure sensors based on graphene membrane arrays

Journal article (2020)

Authors

M. Siskins Kavli institute of nanoscience Delft, QN/Steeneken Lab - AS
M. Lee Kavli institute of nanoscience Delft, QN/Steeneken Lab - AS
Peter G. Steeneken Kavli institute of nanoscience Delft, QN/Steeneken Lab - AS , Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering
P.G. Steeneken Kavli institute of nanoscience Delft, QN/Steeneken Lab - AS , Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering
D. Wehenkel Applied Nanolayers
R. van Rijn EKL-Users - EEMCS , Applied Nanolayers
Tijmen W. de Jong Student, Kavli institute of nanoscience Delft
Johannes R. Renshof Kavli institute of nanoscience Delft, Student
Berend C. Hopman Kavli institute of nanoscience Delft, Student
Willemijn S.J.M. Peters Kavli institute of nanoscience Delft, Student
D. Davidovikj QN/van der Zant Lab - AS , Kavli institute of nanoscience Delft, QN/Steeneken Lab - AS
H.S.J. van der Zant QN/van der Zant Lab - AS , Kavli institute of nanoscience Delft
Research Group
QN/Steeneken Lab (AS) (TU Delft)
Copyright: © 2020 M. Siskins, M. Lee, D. Wehenkel, R. van Rijn, Tijmen W. de Jong, Johannes R. Renshof, Berend C. Hopman, Willemijn S.J.M. Peters, D. Davidovikj, H.S.J. van der Zant, P.G. Steeneken
DOI: https://doi.org/10.1038/s41378-020-00212-3
More Info
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Published Date

2020

Language

English

Faculty

Applied Sciences

Department

QN/Quantum Nanoscience

Research Group

QN/Steeneken Lab

Abstract

The high flexibility, impermeability and strength of graphene membranes are key properties that can enable the next generation of nanomechanical sensors. However, for capacitive pressure sensors, the sensitivity offered by a single suspended graphene membrane is too small to compete with commercial sensors. Here, we realize highly sensitive capacitive pressure sensors consisting of arrays of nearly ten thousand small, freestanding double-layer graphene membranes. We fabricate large arrays of small-diameter membranes using a procedure that maintains the superior material and mechanical properties of graphene, even after high-temperature annealing. These sensors are readout using a low-cost battery-powered circuit board, with a responsivity of up to 47.8 aF Pa−1 mm−2, thereby outperforming the commercial sensors.