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FS
F Scholze
Academic Work (12)
Conference paper (7)
Journal article (4)
Poster (1)
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12 records found
1
Robust UV/VUV/EUV PureB photodiode detector technology with high CMOS Compatibility
Journal article (2014) -
L.K. Nanver (author)
,
L. Qi (author)
,
F Scholze (author)
,
V. Mohammadi (author)
,
C. Mok Kai Rine (author)
,
W.B. de Boer (author)
,
N. Golshani (author)
,
A. Sammak (author)
,
T.L.M. Scholtes (author)
,
Lukas M. Gottwald (author)
,
U Kroth (author)
Stability characterization of high-sensitivity silicon-based EUV photodiodes in a detrimental environment
Journal article (2013) -
L. Shi (author)
,
S. Nihtianova (author)
,
L.K. Nanver (author)
,
F Scholze (author)
Electrical and optical performance investigation of si-based ultrashallow-junction p +-n VUV/EUV photodiodes
Journal article (2012) -
L. Shi (author)
,
S. Nihtianova (author)
,
S. Xia (author)
,
L.K. Nanver (author)
,
Lukas M. Gottwald (author)
,
F Scholze (author)
Surface-charge-collection-enhanced high-sensitivity high-stability silicon photodiodes for DUV and VUV spectral ranges
Journal article (2012) -
L. Shi (author)
,
S. Nihtianova (author)
,
L Haspeslagh (author)
,
F Scholze (author)
,
Lukas M. Gottwald (author)
,
L.K. Nanver (author)
Electrical performance stability characterization of high-sensitivity Si-based EUV photodiodes in a harsh industrial application
Conference paper (2012) -
L. Shi (author)
,
S. Nihtianova (author)
,
F Scholze (author)
,
L.K. Nanver (author)
Electrical performance optimization of a silicon-based EUV photodiode with hear-theoretical quantum efficiency
Conference paper (2011) -
L. Shi (author)
,
L.K. Nanver (author)
,
C Laubis (author)
,
F Scholze (author)
,
S. Nihtianova (author)
High-sensitivity high-stability silicon photodiodes for DUV, VUV and EUV spectral ranges
Conference paper (2011) -
L. Shi (author)
,
S. Nihtianova (author)
,
L.K. Nanver (author)
,
F Scholze (author)
,
Lukas M. Gottwald (author)
high performance silicon based extreme ultraviolet radiation detector for industrial application
Conference paper (2009) -
L. Shi (author)
,
F Sarubbi (author)
,
S. Nihtianova (author)
,
L.K. Nanver (author)
,
T.L.M. Scholtes (author)
,
F Scholze (author)
Stability Investigation of High Performance Silicon-Based DUV/EUV Photodiodes
Conference paper (2009) -
L. Shi (author)
,
F Sarubbi (author)
,
S. Nihtianova (author)
,
L.K. Nanver (author)
,
F Scholze (author)
High-performance DUV/EUV photodiodes in a pure boron doping technology
Conference paper (2008) -
F Sarubbi (author)
,
L.K. Nanver (author)
,
T.L.M. Scholtes (author)
,
S. Nihtianova (author)
,
F Scholze (author)
Pure boron-doped photodiodes: a solution for radiation detection in EUV lithography
Conference paper (2008) -
F Sarubbi (author)
,
L.K. Nanver (author)
,
T.L.M. Scholtes (author)
,
S. Nihtianova (author)
,
F Scholze (author)
Characterization of new EUV stable silicon photodiodes
Poster (2008) -
F Scholze (author)
,
C Laubis (author)
,
F Sarubbi (author)
,
L.K. Nanver (author)
,
S. Nihtianova (author)
