ML Krieg | TU Delft Repository

M

ML Krieg

Conference paper (4)

Doctoral thesis (1)

Journal article (6)

Report (1)

12 records found

1

Interferometer for extreme-UV Lithograpgy mirrors aims for 0.1-nm accuracy

Journal article (2005) - ML Krieg (author)

Measurements from a novel interferometer for EUVL mirror substrates

Journal article (2005) - ML Krieg (author), J.J.M. Braat (author)

Lithographic mirrors measured with sub-nanometre accuracy

Journal article (2004) - ML Krieg (author)

Absolute heterdyne interferometer for strongly aspherical mirrors

Doctoral thesis (2004) - ML Krieg (author)

Lithografische spiegels meten met subnanonauwkeurigheid

Journal article (2004) - ML Krieg (author)

Fast sampling multiplex detector for a hetrodyne interferometer with angstrom precision

Journal article (2003) - O.A. Soloviev (author), Gleb Vdovin (author), ML Krieg (author)

Three-wavelength Laser Light source for absolute, sub-Angstrom, two point source interferometer

Journal article (2003) - ML Krieg (author), GOF Parikesit (author), J.J.M. Braat (author)

Absolute interferometric surface profiling with 1 Å accuracy

Report (2003) - ML Krieg (author), O.A. Soloviev (author)

CMOS translinear implementation of the lock-in pixel

Conference paper (2003) - O.A. Soloviev (author), Gleb Vdovin (author), ML Krieg (author)

Characterization of the Frequency Modulated Continuous Wave Subsystem of an Angstrom Accuracy Absolute Interferometer

Conference paper (2002) - ML Krieg (author), BL Swinkels (author), J.J.M. Braat (author)

Absolute optical path difference measurement with angstrom accuracy over ranges of millimetres.

Conference paper (2001) - ML Krieg (author), RG Klaver (author), J.J.M. Braat (author)

Measuring absolute optical path differences with angstrom accuracy over ranges of millimeters.

Conference paper (2000) - RG Klaver (author), ML Krieg (author), J.J.M. Braat (author)