This paper investigates a modular high frequency high voltage (HV) power supply architecture with planar transformer to achieve compact size and high efficiency. The insulation stress and voltage distribution different architectures with planar transformer are analyzed in firstly. An optimized modular high frequency HV generator architecture with planar transformer is proposed with even voltage distribution, low high frequency AC stress, easy insulation design and good thermal performance. The HV insulation and electric design of the HV planar transformer are provided. A prototype with 300kHz 4kW 140kVDC HV power supply with modular HV generation architecture and planar transformer is built to validate the concept finally.

A novel modular high frequency high voltage (HV) generator with silicon carbide (SiC) power semiconductor devices is proposed in this paper to achieve high efficiency, sharp HV pulse and compact size. The modular architecture is introduced for high frequency operation firstly. The switching characteristics and detailed design consideration on the gate driver circuit are given. Finally, the 8kW output-power, 110kV output-voltage HV generator prototype with 300 kHz500 kHz switching frequency is built to validate the design. Compared with existing design, 2 times high power density, around 10% higher efficiency and 4 times faster HV pulse can be achieved from the proposed modular SiC HV generators.