High depth resolution SIMS analysis with low-energy grazing O2+ beams

Journal article (1997)

Authors

ZX Jiang External organisation
E Algra External organisation
P.F.A. Alkemade Old - sect Electronic Materials (NS/EM)
S Radelaar OLD Metals Processing, Microstructures and Properties
Research Group
Old - sect Electronic Materials (NS/EM)
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Published Date

1997

Language

Undefined/Unknown

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Research Group

Old - sect Electronic Materials (NS/EM)