Piezoresistive cantilever for mechanical force sensors

Conference paper (2005)

Authors

T Chu Duc Electronic Components, Technology and Materials -

J.F. Creemer QN/High Resolution Electron Microscopy

P.J.F. Swart Electronic Components, Technology and Materials -

Pasqualina M Sarro Electronic Components, Technology and Materials -

Pasqualina M. Sarro Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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Published Date

2005

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials