Suspended photonic waveguide arrays for submicrometer alignment

Conference paper (2014)

Authors

T.J. Peters Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering

M. Tichem Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering

U. Staufer Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering

Research Group

Micro and Nano Engineering (Mechanical, Maritime and Materials Engineering) (TU Delft)

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Published Date

2014

Language

English

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Micro and Nano Engineering