Effect of Laser Deflection on Resonant Cantilever Sensors

Conference paper (2009)

Authors

C. Yang Electronic Instrumentation - EEMCS
A. Bossche Electronic Instrumentation - EEMCS
PJ French Electronic Instrumentation - EEMCS
Pim J. French Electronic Instrumentation - EEMCS
P.J. French Electronic Instrumentation - EEMCS
H. Sadeghian Marnani Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
J.F.L. Goosen Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
A. van Keulen Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
K Babaei Gavan QN/Mol. Electronics & Devices
H.S.J. van der Zant QN/Mol. Electronics & Devices
E.W.J.M. van der Drift QN/Kavli Nanolab Delft - AS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
More Info
expand_more

Published Date

2009

Language

English

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation

Abstract

Laser beam deflection is a well-known method commonly used in detecting resonance frequencies in atomic force microscopes and in mass/force sensing. The method focuses a laser spot on the surface of cantilevers to be measured, which might change the mechanical properties of the cantilevers and affect the measurement accuracy. In this work we showed that the joule heating of the laser, besides other extrinsic effects such as surface contamination, can cause a significant amount of shift in the resonator. The longer and softer the cantilever is, the more significant the effect. We suggest that the laser effects on the resonant response of sensors have to be taken into account.