Atomic layer deposition of aluminium oxide at atmospheric pressure and room temperature

Poster (2014)

Authors

D. Valdesueiro Gonzalez ChemE/Product and Process Engineering - AS
Research Group
ChemE/Product and Process Engineering (AS) (TU Delft)
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Published Date

2014

Language

English

Reuse Rights

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Faculty

Applied Sciences

Department

ChemE/Chemical Engineering

Research Group

ChemE/Product and Process Engineering