Nanomechanical resonators fabricated by atomic layer deposition on suspended 2D materials

Journal article (2023)

Authors

Hanqing Liu Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering
Saravana B. Basuvalingam Eindhoven University of Technology
S.V. Lodha Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering , Indian Institute of Technology Bombay
Ageeth A. Bol University of Michigan
H.S.J. van der Zant Kavli institute of nanoscience Delft, QN/van der Zant Lab - AS
Peter G. Steeneken Kavli institute of nanoscience Delft, Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering
P.G. Steeneken Kavli institute of nanoscience Delft, Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering
G.J. Verbiest Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering
Research Group
Dynamics of Micro and Nano Systems (Mechanical, Maritime and Materials Engineering) (TU Delft)
Copyright: © 2023 Hanqing Liu, Saravana B. Basuvalingam, S.V. Lodha, Ageeth A. Bol, H.S.J. van der Zant, P.G. Steeneken, G.J. Verbiest
DOI: https://doi.org/10.1088/2053-1583/acf58a
More Info
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Published Date

2023

Language

English

Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Dynamics of Micro and Nano Systems

Abstract

Atomic layer deposition (ALD), a layer-by-layer controlled method to synthesize ultrathin materials, provides various merits over other techniques such as precise thickness control, large area scalability and excellent conformality. Here we demonstrate the possibility of using ALD growth on top of suspended 2D materials to fabricate nanomechanical resonators. We fabricate ALD nanomechanical resonators consisting of a graphene/MoS2 heterostructure. Using atomic force microscope indentation and optothermal drive, we measure their mechanical properties including Young’s modulus, resonance frequency and quality factor, showing a lower energy dissipation compared to their exfoliated counterparts. We also demonstrate the fabrication of nanomechanical resonators by exfoliating an ALD grown NbS2 layer. This study exemplifies the potential of ALD techniques to produce high-quality suspended nanomechanical membranes, providing a promising route towards high-volume fabrication of future multilayer nanodevices and nanoelectromechanical systems.