Fabrication of Devices and Antennas for Millimeter-Wave and Terahertz Systems

Conference paper (2019)

Authors

Choonsup Lee California Institute of Technology
D. Gonzalez-Ovejero CentraleSupelec-IETR UMR 6164
M. Alonso Del Pino California Institute of Technology
C. Jung California Institute of Technology
I. Mehdi California Institute of Technology
G. Chattopadhyay California Institute of Technology
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Published Date

2019-9

Language

English

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Abstract

We have demonstrated corrugated horn antennas at 560 GHz fabricated with a deep reactive ion etching (DRIE) process on silicon. The measurement of two of the ( 2 times 2)560 GHz array antenna has shown that the return loss and directivity are 13 dB and 22 dB, respectively. All of the measured antennas had below-25 dB of the cross-polarization and symmetrical beam patterns. The silicon microfabrication technique enables us to build hundreds of horn antennas at once, allowing construction of multi-pixel heterodyne imagers and spectrometers at submillimeter wavelengths.