Fabrication of tunable clamped-clamped microresonators in silicon

Journal article (2011)

Authors

R van Leeuwen External organisation
PHR Lew QN/Kavli Nanolab Delft - AS
E.W.J.M. van der Drift QN/Kavli Nanolab Delft - AS
H.S.J. van der Zant QN/Mol. Electronics & Devices
W.J. Venstra QN/Mol. Electronics & Devices
Research Group
QN/Kavli Nanolab Delft (AS) (TU Delft)
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Published Date

2011

Language

English

Reuse Rights

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Faculty

Applied Sciences

Department

QN/Quantum Nanoscience

Research Group

QN/Kavli Nanolab Delft