Process technology of high-aspect-ratio silicon beams for stretchable silicon electronics

Conference paper (2008)

Authors

T. Zoumpoulidis Old - EWI Sect. ECTM
J. Tian Old - EWI Sect. ECTM
S Sosin Old - EWI Sect. ECTM
M. Bartek Old - EWI Sect. ECTM
L Wang Electronic Components, Technology and Materials - EEMCS
K.M.B. Jansen Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
L.J. Ernst Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
Ronald Dekker Electronic Components, Technology and Materials - EEMCS
R. Dekker Electronic Components, Technology and Materials - EEMCS
P de Graaf External organisation
Research Group
Old - EWI Sect. ECTM
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Published Date

2008

Language

Undefined/Unknown

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Research Group

Old - EWI Sect. ECTM