Photoacoustic raster scan imaging using an optomechanical ultrasound sensor in silicon photonics

Conference paper (2022)

Authors

Cedric Pieters IMEC-Solliance
W.J. Westerveld IMEC-Solliance, Optical Technologies - Mechanical, Maritime and Materials Engineering
Hasan Mahmud-Ul-Hasan IMEC-Solliance
Simone Severi IMEC-Solliance
Jon Kjellman IMEC-Solliance
Roelof Jansen IMEC-Solliance
Veronique Rochus IMEC-Solliance
Xavier Rottenberg IMEC-Solliance
Research Group
Optical Technologies (Mechanical, Maritime and Materials Engineering) (TU Delft)
Copyright: © 2022 Cedric Pieters, W.J. Westerveld, Hasan Mahmud-Ul-Hasan, Simone Severi, Jon Kjellman, Roelof Jansen, Veronique Rochus, Xavier Rottenberg
DOI: https://doi.org/10.1117/12.2607501
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Published Date

2022

Language

English

Reuse Rights

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Optical Technologies

Abstract

Photoacoustic tomography defines new challenges for ultrasound detection compared to ultrasonography. To address these challenges, a sensitive, small, scalable, and broadband optomechanical ultrasound sensor (OMUS) has been developed. The OMUS is an on-chip optical ultrasound sensor, using optical interferometric ultrasound detection. It consists of an acoustic membrane on top of an optical ring resonator that modulates the optical ring resonance with high efficiency enabled by an innovative optomechanical waveguide. Raster scanning photoacoustic tomography has been demonstrated with a single-element OMUS. Based on performance and form factor, the OMUS combined with passive optical multiplexing may enable new applications in photoacoustic imaging.

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