Capacitive Sensing System Design for a rotating AMB with sub-nanometer positioning accuracy

Conference paper (2006)

Authors

PM Overschie Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

L Jabben Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

J.P. van Schieveen Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

J.W. Spronck Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

J. van Eijk Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

Research Group

Mechatronic Systems Design (Mechanical, Maritime and Materials Engineering) (TU Delft)

To reference this document use:

http://resolver.tudelft.nl/uuid:c050dd67-e071-4688-9ca3-f209d4a79150

More Info

expand_more

Published Date

2006

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Mechatronic Systems Design