Secondary electron emission from multi-layered TiN/Al2O3transmission dynodes

Journal article (2021)

Authors

H.W. Chan Nikhef, Electronic Components, Technology and Materials - EEMCS
V. Prodanovic Nikhef, EKL-Users - EEMCS
A.M.M.G. Theulings RST/Neutron and Positron Methods in Materials - AS
C. W. Hagen ImPhys/Microscopy Instrumentation & Techniques - AS
C.W. Hagen ImPhys/Microscopy Instrumentation & Techniques - AS
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
Pasqualina M. Sarro Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
Copyright: © 2021 H.W. Chan, V. Prodanovic, A.M.M.G. Theulings, C.W. Hagen, Pasqualina M Sarro, H. v.d. Graaf
DOI: https://doi.org/10.1088/1748-0221/16/07/P07024
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Published Date

2021

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials

Abstract

The (secondary) electron emission from multilayered Al2O3/TiN membranes has been investigated with a hemispherical collector system in a scanning electron microscope for electrons with energies between 0.3 and 10 keV. These ultra-thin membranes are designed to function as transmission dynodes in novel vacuum electron multipliers. Two different types, a bi-layer and a tri-layer, have been manufactured by means of atomic-layer deposition (ALD) of aluminum oxide and sputtering of titanium nitride. The reflection and transmission electron yield (σR, σT) have been measured for both types of membranes. In comparison, the tri-layer membranes outperformed the bi-layer membranes in terms of transmission electron yield for films with the same effective thickness. The highest transmission electron yield was measured on an Al2O3/TiN/Al2O3 film with layer thicknesses of 5/2.5/5 nm, which had a maximum transmission electron yield {σ T max(E0) of 3.1 (1.55 keV). Furthermore, the bi-layer membranes have been investigated more in-depth by performing an additional measurement using a positive sample bias to separate the transmitted fraction ηT and the transmission secondary electron yield δT. The transmitted fraction was used to determine the transmission parameter p, which characterizes the interaction of primary electrons (PEs) in thin films. The transmission secondary electron yield was used to compare the energy transfer of PEs in films with different thicknesses.

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