A new self-sealing thin-film encapsulation process for MEMS

Conference paper (2013)

Authors

F. Santagata Electronic Components, Technology and Materials -

I Zaccaria External organisation

René H. Poelma Electronic Components, Technology and Materials -

J.F. Creemer Electronic Components, Technology and Materials -

Kouchi Zhang Electronic Components, Technology and Materials -

Guoqi Zhang Electronic Components, Technology and Materials -

Pasqualina M. Sarro Electronic Components, Technology and Materials -

Pasqualina M Sarro Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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More Info

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Published Date

2013

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials