Mechanical reliability of a segmented silicon layer on ultra-thin polyimide substrates

Journal article (2007)

Authors

L WANG Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
A. Xiao Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
K.M.B. Jansen Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
M. Bartek Old - EWI Ch. Integrated Sensing Devices
T. Zoumpoulidis Old - EWI Ch. Integrated Sensing Devices
L.J. Ernst Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
Guoqi Zhang Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
Kouchi Zhang Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
Research Group
Computational Design and Mechanics (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2007

Language

Undefined/Unknown

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Computational Design and Mechanics