Carbon nanotube vias fabricated at back-end of line compatible temperature using a novel CoAl catalyst

Conference paper (2013)

Authors

S. Vollebregt Electronic Components, Technology and Materials -

Sten Vollebregt Electronic Components, Technology and Materials -

H. Schellevis Electronic Components, Technology and Materials -

C.I.M. Beenakker Electronic Components, Technology and Materials -

R. Ishihara Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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More Info

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Published Date

2013

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials