Bimorph actuators in thick SiO2 for photonic alignment

Conference paper (2016)

Authors

K. Wu Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering
T.J. Peters Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering
M. Tichem Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering
Ferry Postma LioniX International BV
Albert Prak LioniX International BV
Kerstin Wörhoff LioniX International BV
Arne Leinse LioniX International BV
Research Group
Micro and Nano Engineering (Mechanical, Maritime and Materials Engineering) (TU Delft)
Copyright: © 2016 K. Wu, T.J. Peters, M. Tichem, Ferry Postma, Albert Prak, Kerstin Wörhoff, Arne Leinse
DOI: https://doi.org/10.1117/12.2209499
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Published Date

2016

Language

English

Reuse Rights

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Micro and Nano Engineering

Abstract

This paper proposes and tests a design of electro-thermal bimorph actuators for alignment of flexible photonic waveguides fabricated in 16 μm thick SiO2. The actuators are for use in a novel alignment concept for multi-port photonic integrated circuits (PICs), in which the fine alignment is taken care of by positioning of suspended, mechanically flexible waveguide beams on one or more of the PICs. The design parameters of the bimorph actuator allow to tune both the initial relative position of the waveguide end-facets, and the motion range of the actuators. Bimorph actuators have been fabricated and characterized. The maximum out-of-plane deflection of the bimorph actuator (with 720 μm-long poly-Si) can reach 18:5 μm with 126:42mW, sufficient for the proposed application.

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