Correction to

Highly-sensitive wafer-scale transfer-free graphene MEMS condenser microphones (Microsystems & Nanoengineering, (2024), 10, 1, (27), 10.1038/s41378-024-00656-x)

Journal article (2024)

Authors

Roberto Pezone Electronic Components, Technology and Materials -

R. Pezone Electronic Components, Technology and Materials -

S. Anzinger Infineon Technologies AG

Gabriele Baglioni QN/Quantum Nanoscience , QN/van der Zant Lab -

G. Baglioni QN/Quantum Nanoscience , QN/van der Zant Lab -

H. S. Wasisto Infineon Technologies AG

Pasqualina M. Sarro Electronic Components, Technology and Materials -

Pasqualina M Sarro Electronic Components, Technology and Materials -

Peter G. Steeneken QN/Quantum Nanoscience , Precision and Microsystems Engineering , Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering

P.G. Steeneken QN/Quantum Nanoscience , Precision and Microsystems Engineering , Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering

Sten Vollebregt Electronic Components, Technology and Materials -

S. Vollebregt Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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http://resolver.tudelft.nl/uuid:6cefc3f8-d859-478c-8714-baa7f4751522

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Published Date

2024

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials

Abstract

Correction to: Microsystems & Nanoengineering https://doi.org/10.1038/s41378-024-00656-x published online 21 February 2024 After publication of this article¹, it was brought to our attention that two pressure values were not correctly copied from the submitted original work to the published version. Correction 1 (from PDF, Page 4 of 9): “These membranes show resonance frequencies above the audible range (f₀₁ > 20 kHz) at 1 × 10³ mbar by piezo-shaker actuation”. The described phrase needs to be changed reporting the right pressure value of 1 × 10⁻³ mbar. The new phrase will be: “These membranes show resonance frequencies above the audible range (f₀₁ > 20 kHz) at 1 × 10⁻³ mbar by piezo-shaker actuation”. Correction 2 (from PDF, Page 4 of 9): “Energy losses and dampening are minimized due to the low pressure of 1 × 10³ mbar”. Again, the described phrase needs to be changed reporting the right pressure value of 1 × 10⁻³ mbar. The new phrase will be: “Energy losses and dampening are minimized due to the low pressure of 1 × 10⁻³ mbar”.

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