Pure dopant deposition of B and Ga for ultrashallow junctions in Si-based devices

Conference paper (2012)

Authors

L.K. Nanver Electronic Components, Technology and Materials -

A. Sammak Electronic Components, Technology and Materials -

V. Mohammadi Electronic Components, Technology and Materials -

KRC Mok External organisation

L. Qi Electronic Components, Technology and Materials -

A. Sakic Electronic Components, Technology and Materials -

N. Golshani Electronic Components, Technology and Materials -

J Derakhshandeh External organisation

T.L.M. Scholtes Electronic Components, Technology and Materials -

W.B. de Boer Old - EWI Sect. ECTM

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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Published Date

2012

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials