Titanium nitride (TiN) as a gate material in BiCMOS devices for biomedical implants

Conference paper (2013)

Authors

N.S. Lawand Electronic Instrumentation - EEMCS
H.W. van Zeijl Electronic Components, Technology and Materials - EEMCS
PJ French Electronic Instrumentation - EEMCS
Pim J. French Electronic Instrumentation - EEMCS
P.J. French Electronic Instrumentation - EEMCS
JJ Briaire External organisation
JHM Frijns External organisation
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2013

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation