Gas-phase deposition of thin aluminium oxide films at ambient conditions

Doctoral thesis (2015)

Authors

D. Valdesueiro Gonzalez ChemE/Product and Process Engineering - AS
Research Group
ChemE/Product and Process Engineering (AS) (TU Delft)
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Published Date

2015

Language

English

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Faculty

Applied Sciences

Department

ChemE/Chemical Engineering

Research Group

ChemE/Product and Process Engineering