IC compatible top down process for Silicon Nanowire fet arrays with three {100} surfaces for (BIO) chemical sensing

Conference paper (2011)

Authors

T.S.Y. Moh OLD ChemE/Organic Materials and Interfaces
Y.. Maruyama Signal Processing Systems - EEMCS
C. Shen Electronic Components, Technology and Materials - EEMCS
G. Pandraud Electronic Components, Technology and Materials - EEMCS
L.C.P.M. de Smet OLD ChemE/Organic Materials and Interfaces
HD Tong External organisation
C. van Rijn External organisation
Ernst J. R. Sudhölter OLD ChemE/Organic Materials and Interfaces
Pasqualina M. Sarro Electronic Components, Technology and Materials - EEMCS
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
Research Group
OLD ChemE/Organic Materials and Interfaces
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Published Date

2011

Language

English

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Research Group

OLD ChemE/Organic Materials and Interfaces