Hermeticity and thermal stability testing of PECVD silicon nitride thin-film packages

Conference paper (2008)

Authors

Q Li Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
J.F.L. Goosen Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
JTM van Beek External organisation
A. van Keulen Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
KL Phan External organisation
B. van Velzen External organisation
JJM Bontemps External organisation
JJ Koning External organisation
Guoqi Zhang Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering
Kouchi Zhang Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering
Research Group
Computational Design and Mechanics (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2008

Language

Undefined/Unknown

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Computational Design and Mechanics