VUV/low-energy electron Si photodiodes with postmetal 400°C PureB deposition

Journal article (2013)

Authors

V. Mohammadi Electronic Components, Technology and Materials -

L. Qi Electronic Components, Technology and Materials -

N. Golshani Electronic Components, Technology and Materials -

C. Mok Kai Rine Electronic Components, Technology and Materials -

W.B. de Boer Old - EWI Sect. ECTM

A. Sammak Electronic Components, Technology and Materials -

J. Derakhshandeh Kheljani Electronic Components, Technology and Materials -

J. van der Cingel Electronic Components, Technology and Materials -

L.K. Nanver Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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http://resolver.tudelft.nl/uuid:3409b021-b06d-448e-97cf-9e5c9c235cd1

More Info

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Published Date

2013

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials