Reduction of surface roughness of a silicon chip for advanced nanocalorimetry

Journal article (2008)

Authors

L. La Spina Old - EWI Sect. ECTM
D Ovchinnikov External organisation
W.H.A. Wien Electronic Components, Technology and Materials - EEMCS
AW van Herwaarden External organisation
E.J.G. Goudena Old - EWI Sect. ECTM
J Loos External organisation
L.K. Nanver Electronic Components, Technology and Materials - EEMCS
Research Group
Old - EWI Sect. ECTM
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Published Date

2008

Language

Undefined/Unknown

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Research Group

Old - EWI Sect. ECTM