Deep p+ junctions formed by drive-in from pure boron depositions

Conference paper (2010)

Authors

P Maleki Electronic Components, Technology and Materials -

T.L.M. Scholtes Electronic Components, Technology and Materials -

M Popadic Electronic Components, Technology and Materials -

F Sarubbi Electronic Components, Technology and Materials -

G. Lorito Electronic Components, Technology and Materials -

S. Milosavljevic Electronic Components, Technology and Materials -

W.B. de Boer Electronic Components, Technology and Materials -

L.K. Nanver Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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Published Date

2010

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials