Fabrication of AlN slender piezoelectric cantilevers for high-speed MEMS actuations

Conference paper (2011)

Authors

A.T. Tran Electronic Components, Technology and Materials -

G. Pandraud Electronic Components, Technology and Materials -

H. Schellevis Electronic Components, Technology and Materials -

T Alan Electronic Components, Technology and Materials -

V Aravindh External organisation

O Wunnicke External organisation

Pasqualina M Sarro Electronic Components, Technology and Materials -

Pasqualina M. Sarro Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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Published Date

2011

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials